SHIBAURA MECHATRONICS CORPORATION

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 38324
 
  
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 1883
 
  
 
B08B CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL 1642
 
  
 
B05C APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL 1035
 
  
 
G03F PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR 896
 
  
 
H01J ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 8120
 
  
 
B29C SHAPING OR JOINING OF PLASTICS; SHAPING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL; AFTER- TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING 6119
 
  
 
B05D PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL 582
 
  
 
B32B LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM5152
 
  
 
G01N INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES 5201

Top Patents (by citation)

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Recent Publications

Publication # Title Filing Date Pub Date Intl Class
2018/0047,559 SUBSTRATE TREATMENT DEVICE AND SUBSTRATE TREATMENT METHODAug 08, 17Feb 15, 18[H01L, B08B]
2018/0022,016 TEMPLATE FOR IMPRINTSep 29, 17Jan 25, 18[B29C]
2018/0015,497 IMPRINT TEMPLATE MANUFACTURING APPARATUSSep 27, 17Jan 18, 18[B05C, B29C, G03F]
2018/0016,673 IMPRINT TEMPLATE MANUFACTURING APPARATUSSep 26, 17Jan 18, 18[C23C, B29C, G03F]
2017/0369,987 FILM FORMING APPARATUS, METHOD FOR MANUFACTURING FILM-FORMED PRODUCT, AND METHOD FOR MANUFACTURING ELECTRONIC COMPONENTJun 28, 17Dec 28, 17[C23C, H01J, H01L]
2017/0287,743 SUBSTRATE TREATING DEVICE AND SUBSTRATE TREATING METHODMar 30, 17Oct 05, 17[H01L, B08B]
2017/0275,761 PLASMA PROCESSING APPARATUSMar 23, 17Sep 28, 17[C23C, H01J]
2017/0259,595 TABLET PRINTING APPARATUS AND TABLET PRINTING METHODMay 26, 17Sep 14, 17[H04N, B41J, G06K]
2017/0250,097 SUBSTRATE TREATMENT APPARATUS, SUBSTRATE TREATMENT METHOD, AND METHOD FOR MANUFACTURING SUBSTRATEFeb 24, 17Aug 31, 17[H01L, G02F]
2017/0053,779 SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHODAug 18, 16Feb 23, 17[H01J, C23C]

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
9922861 Substrate gripping device and substrate processing apparatusApr 08, 14Mar 20, 18[H01L]
9811096 Liquid feeding device and substrate treating deviceNov 12, 15Nov 07, 17[B05C, H01L, B05B, G05D]
9795999 Substrate processing apparatus and substrate processing methodMar 27, 15Oct 24, 17[H01L, B08B]
9741596 Bonding apparatus and bonding process methodDec 23, 13Aug 22, 17[C08J, H01L, B29C, B23K, B32B]
9694371 Substrate treatment apparatus and substrate treatment methodMar 27, 15Jul 04, 17[B05C, H01L, B05B]
9679787 Spin treatment apparatusAug 29, 14Jun 13, 17[B05C, H01L, G03F]
9612205 Etching amount measurement apparatus for dry etching apparatusAug 20, 14Apr 04, 17[H01J, C09K, H01L, G01N, G01B]
9607865 Substrate processing device and substrate processing methodMar 14, 14Mar 28, 17[H01L]
9586391 Bonding apparatus and method for manufacturing bonded substrateSep 21, 15Mar 07, 17[H01L, B23K, B32B]
9553003 Substrate processing device and substrate processing methodMar 14, 14Jan 24, 17[H01L]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2015/0090,297 SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHODAbandonedSep 24, 14Apr 02, 15[H01L, B08B]
2015/0090,296 SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHODAbandonedSep 24, 14Apr 02, 15[B08B]
2015/0090,298 SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHODAbandonedSep 24, 14Apr 02, 15[B08B]
2014/0041,694 CLEANING SOLUTION PRODUCING APPARATUS, CLEANING SOLUTION PRODUCING METHOD, AND SUBSTRATE CLEANING APPARATUSAbandonedAug 07, 13Feb 13, 14[H01L]
8506774 Vacuum processing deviceExpiredMay 16, 05Aug 13, 13[C23C]
8508246 Substrate surface inspecting apparatus and substrate surface inspecting methodExpiredNov 18, 08Aug 13, 13[G01R]
8497985 Inspection method based on captured image and inspection deviceExpiredOct 22, 08Jul 30, 13[G01J, G01N]
8488867 Inspection device for disk-shaped substrateExpiredOct 22, 08Jul 16, 13[G06K]
2013/0169,793 INSPECTION SYSTEM AND INSPECTION METHODAbandonedDec 28, 12Jul 04, 13[H04N]
2013/0169,795 ILLUMINATION SYSTEM, ILLUMINATION METHOD, AND INSPECTION SYSTEMAbandonedDec 28, 12Jul 04, 13[H04N, H05B]
8475870 Resin layer formation method, resin layer formation device, disk and disk manufacturing methodExpiredDec 02, 11Jul 02, 13[B05D]
2012/0192,953 PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHODAbandonedJul 28, 10Aug 02, 12[E03B]
2012/0132,617 PLASMA ETCHING APPARATUS AND PLASMA ETCHING METHODAbandonedAug 05, 10May 31, 12[H01L]
2012/0083,918 SEALED CONTAINER AND SEMICONDUCTOR MANUFACTURING APPARATUSAbandonedSep 28, 11Apr 05, 12[G06F, B65D]
8104385 Brittle workpiece splitting system and brittle workpiece splitting methodExpiredOct 07, 05Jan 31, 12[B26D, C03B, B23K, B26F]
2011/0290,185 SUBSTRATE COOLING DEVICE AND SUBSTRATE TREATMENT SYSTEMAbandonedDec 02, 09Dec 01, 11[C23C]
2011/0278,261 ETCHING ACID WASTE LIQUID DISPOSAL SYSTEM, ETCHING ACID WASTE LIQUID DISPOSAL APPARATUS AND ETCHING ACID WASTE LIQUID DISPOSAL METHOD APPLIED TO THE SYSTEM AND THE APPARATUSAbandonedMay 10, 11Nov 17, 11[C23F, B01D]
2011/0263,133 SEMICONDUCTOR DEVICE MANUFACTURING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHODAbandonedApr 22, 11Oct 27, 11[H01L, B05C]
2011/0143,549 ETCHING METHOD, METHOD FOR MANUFACTURING MICROSTRUCTURE, AND ETCHING APPARATUSAbandonedDec 08, 10Jun 16, 11[H01L, C23F, B44C]
7950434 Adhesive tape adhering apparatusExpiredOct 27, 08May 31, 11[B32B]

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